Composition for forming resist underlayer film and method for forming pattern

ABSTRACT

A resist underlayer film-forming composition includes (A) a polymer that includes a repeating unit shown by a formula (1), and has a polystyrene-reduced weight average molecular weight of 3000 to 10,000, and (B) a solvent, 
     
       
         
         
             
             
         
       
     
     wherein R 3  to R 8  individually represent a group shown by the following formula (2) or the like, 
       —O—R 1 ≡R 2    (2)
 
     wherein R 1  represents a single bond or the like, and R 2  represents a hydrogen atom or the like.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application claims priority under 35 U.S.C. §119 to JapanesePatent Application No. 2011-81332, filed Mar. 31, 2011. The contents ofthis application are incorporated herein by reference in their entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The invention relates to a composition for forming a resist underlayerfilm (hereinafter referred to as “resist underlayer film-formingcomposition”) and a method for forming a pattern.

Discussion of the Background

A semiconductor device production process normally includes depositing aplurality of materials (processing target film) on a silicon wafer, andpatterning the processing target film to form a desired pattern. Whenpatterning the processing target film, a photosensitive material(resist) is deposited on the processing target film to form a resistfilm, and a given area of the resist film is exposed. The exposed areaor the unexposed area of the resist film is removed by development toform a resist pattern, and the processing target film is dry-etchedusing the resist pattern as an etching mask.

Such a process utilizes ultraviolet rays (e.g., ArF excimer laser light)as the exposure light source for exposing the resist film. A reductionin line width of large-scale integrated circuits (LSI) has beenincreasingly desired, and a resolution equal to or shorter than theexposure wavelength may be required.

A process has been studied that forms a resist underlayer film(hereinafter may be referred to as “underlayer film”) on the processingtarget film, transfers the resist pattern to the underlayer film to forman underlayer film pattern, and transfers the resist pattern to theprocessing target film using the underlayer film pattern as an etchingmask (hereinafter may be referred to as “multilayer resist process”).When using the multilayer resist process, it is desirable that theunderlayer film be formed of a material that exhibits etchingresistance. For example, a composition that contains a polymer that hasa side-chain alkynyloxy group has been proposed as a material forforming such an underlayer film (see Japanese Patent ApplicationPublication (KOKAI) No. 2009-014816).

It is necessary to embed depressions formed in a topological substratewhen forming a pattern using lithography. In this case, an underlayerfilm material may be applied, and the resulting film may be planarized.

When forming a flat film on a topological substrate, it is necessary toincrease the fluidity of the composition used to form the film.Therefore, it is desirable that the polymer included in the compositionhave a low molecular weight.

SUMMARY OF THE INVENTION

According to one aspect of the invention, a resist underlayerfilm-forming composition includes (A) a polymer that includes arepeating unit shown by a formula (1), and has a polystyrene-reducedweight average molecular weight of 3000 to 10,000, and (B) a solvent,

wherein R³ to R⁸ individually represent a group shown by a formula (2),a hydrogen atom, a hydroxyl group, a substituted or unsubstituted alkylgroup having 1 to 6 carbon atoms, a substituted or unsubstituted alkoxygroup having 1 to 6 carbon atoms, a substituted or unsubstitutedalkoxycarbonyl group having 2 to 10 carbon atoms, a substituted orunsubstituted aryl group having 6 to 14 carbon atoms, or a substitutedor unsubstituted glycidyl ether group having 2 to 6 carbon atoms,provided that at least one of R³ to R⁸ represents the group shown by theformula (2), and X represents a substituted or unsubstituted alkanediylgroup having 1 to 10 carbon atoms, a substituted or unsubstitutedcycloalkanediyl group having 3 to 20 carbon atoms, a substituted orunsubstituted alkanediyloxy group having 1 to 10 carbon atoms, asubstituted or unsubstituted cycloalkanediyloxy group having 3 to 20carbon atoms, a substituted or unsubstituted arylene group having 6 to14 carbon atoms, or a divalent group formed by combining arbitrarygroups among these groups,

—O—R¹≡R²   (2)

wherein R¹ represents a single bond, a substituted or unsubstitutedalkanediyl group having 1 to 20 carbon atoms, or a substituted orunsubstituted arylene group having 6 to 20 carbon atoms, and R²represents a hydrogen atom, a substituted or unsubstituted alkyl grouphaving 1 to 20 carbon atoms, or a substituted or unsubstituted arylgroup having 6 to 20 carbon atoms.

According to another aspect of the invention, a method for forming apattern includes applying the resist underlayer film-forming compositionto a substrate to form a resist underlayer film. A resist composition isapplied to the substrate to form a resist film. The resist film isexposed by selectively applying radiation to the resist film via aphotomask. The exposed resist film is developed to form a resistpattern. The resist underlayer film and the substrate are dry-etchedusing the resist pattern as a mask to form a pattern.

BRIEF DESCRIPTION OF DRAWINGS

A more complete appreciation of the invention and many of the attendantadvantages thereof will be readily obtained as the same becomes betterunderstood by reference to the following detailed description whenconsidered in connection with the accompanying drawing.

FIG. 1 is a flowchart showing a method of producing a polymer includedin a resist underlayer film-forming composition according to oneembodiment of the invention.

DESCRIPTION OF THE EMBODIMENTS

Embodiments of the invention are described below.

-   [1] A resist underlayer film-forming composition including (A) a    polymer that includes a repeating unit shown by the following    formula (1), and has a polystyrene-reduced weight average molecular    weight of 3000 to 10,000, and (B) a solvent,

wherein R³ to R⁸ individually represent a group shown by the followingformula (2) (hereinafter may be referred to as “specific substituent(S1)”), a hydrogen atom, a hydroxyl group, a substituted orunsubstituted alkyl group having 1 to 6 carbon atoms, a substituted orunsubstituted alkoxy group having 1 to 6 carbon atoms, a substituted orunsubstituted alkoxycarbonyl group having 2 to 10 carbon atoms, asubstituted or unsubstituted aryl group having 6 to 14 carbon atoms, ora substituted or unsubstituted glycidyl ether group having 2 to 6 carbonatoms, provided that at least one of R³ to R⁸ represents the group shownby the formula (2), and X represents a substituted or unsubstitutedalkanediyl group having 1 to 10 carbon atoms, a substituted orunsubstituted cycloalkanediyl group having 3 to 20 carbon atoms, asubstituted or unsubstituted alkanediyloxy group having 1 to 10 carbonatoms, a substituted or unsubstituted cycloalkanediyloxy group having 3to 20 carbon atoms, a substituted or unsubstituted arylene group having6 to 14 carbon atoms, or a divalent group formed by combining arbitrarygroups among these groups,

—O—R¹≡R²   (2)

wherein R′ represents a single bond, a substituted or unsubstitutedalkanediyl group having 1 to 20 carbon atoms, or a substituted orunsubstituted arylene group having 6 to 20 carbon atoms, and R²represents a hydrogen atom, a substituted or unsubstituted alkyl grouphaving 1 to 20 carbon atoms, or a substituted or unsubstituted arylgroup having 6 to 20 carbon atoms.

The resist underlayer film-forming composition according to [1], whereinthe polymer (A) has a dispersity of 1.4 to 5.0.

-   [3] The resist underlayer film-forming composition according to [1]    or [2], further including (C) an acid generator.-   [4] The resist underlayer film-forming composition according to any    one of [1] to [3], further including (D) a crosslinking agent.-   [5] A method for forming a pattern including (1) a step of applying    the resist underlayer film-forming composition according to any one    of [1] to [4] to a substrate to form a resist underlayer film, (2) a    step of applying a resist composition to the substrate to form a    resist film, (3) a step of exposing the resist film by selectively    applying radiation to the resist film via a photomask, (4) a step of    developing the exposed resist film to form a resist pattern, and (5)    a step of dry-etching the resist underlayer film and the substrate    using the resist pattern as a mask to form a pattern.

The resist underlayer film-forming composition according to the aboveembodiment of the invention can form a resist underlayer film thatexhibits excellent etching resistance as compared with a related-artresist underlayer film, can fill depressions formed in a substratetherewith to produce a flat resist underlayer film, and can reduce theamount of outgas released when forming a resist underlayer film.Therefore, it is expected that the resist underlayer film-formingcomposition improves the yield of microfabrication using a lithographicprocess (particularly production of integrated circuit devices).

The embodiments will now be described with reference to the accompanyingdrawing. Note that the invention is not limited to the followingembodiments. It should be understood that various modifications andimprovements may be made of the following embodiments without departingfrom the scope of the invention based on common knowledge of a personskilled in the art.

The term “substituent” used herein is not particularly limited. Examplesof a group that is included in the term “substituent” used hereininclude —R^(S1), —R^(S2)—O—R^(S1), —R^(S2)—CO—R^(S1),—R^(S2)—CO—OR^(S1), —R^(S2)—O—CO—R^(S1), —R^(S2)—OH, and —R^(S2)—CN(wherein R^(S1) represents an alkyl group having 1 to 10 carbon atoms, acycloalkyl group having 3 to 20 carbon atoms, or an aryl group having 6to 30 carbon atoms, provided that some or all of the hydrogen atoms ofthese groups may be substituted with a fluorine atom, and R^(S2)represents an alkanediyl group having 1 to 10 carbon atoms, acycloalkanediyl group having 3 to 20 carbon atoms, an arylene grouphaving 6 to 30 carbon atoms, a group obtained by substituting some orall of the hydrogen atoms of these groups with a fluorine atom, or asingle bond).

The expression “substituted with a substituent” used herein means that agroup is substituted with one or more of one type of substituent, orsubstituted with one or more of each of a plurality of types ofsubstituent.

1. Resist Underlayer Film-Forming Composition

A resist underlayer film-forming composition according to one embodimentof the invention is described below. The resist underlayer film-formingcomposition according to one embodiment of the invention includes (A) apolymer that includes a repeating unit shown by the formula (1), and hasa polystyrene-reduced weight average molecular weight (hereinafter maybe referred to as “Mw”) of 3000 to 10,000 (hereinafter may be referredto as “polymer (A)”), and (B) a solvent.

[1] Polymer (A)

The polymer (A) according to one embodiment of the invention includes astructural unit shown by the formula (1) (hereinafter may be referred toas “structural unit (a)”).

[Structural Unit (a)]

X in the formula (1) represents an alkanediyl group having 1 to 10carbon atoms, a cycloalkanediyl group having 3 to 20 carbon atoms, analkanediyloxy group having 1 to 10 carbon atoms, a cycloalkanediyloxygroup having 3 to 20 carbon atoms, an arylene group having 6 to 14carbon atoms, or a divalent group formed by combining arbitrary groupsamong these groups, provided that these groups may be substituted with asubstituent.

Examples of the alkanediyl group include chain-like saturatedhydrocarbon groups such as a methanediyl group, an ethanediyl group, apropanediyl group, a butanediyl group, a pentanediyl group, a hexanediylgroup, an octanediyl group, a decanediyl group, an undecanediyl group, ahexadecanediyl group, and an icosanediyl group, and the like. Amongthese, a methylene group and an ethylene group are preferable.

Examples of a preferable substituent for the alkanediyl group include afuranyl group.

Examples of the cycloalkanediyl group include monocyclic saturatedhydrocarbon groups such as a cyclopropanediyl group, a cyclobutanediylgroup, a cyclopentanediyl group, a cyclohexanediyl group, acycloheptanediyl group, a cyclooctanediyl group, a cyclodecanediylgroup, a methylcyclohexanediyl group, and an ethylcyclohexanediyl group;polycyclic saturated hydrocarbon groups such as abicyclo[2.2.1]heptanediyl group, a bicyclo[2.2.2]octanediyl group, atricyclo[5.2.1.0^(2,6)] decanediyl group, atricyclo[3.3.1.1^(3,7)]decanediyl group, atetracyclo[6.2.1.1^(3,6).0^(2,7)]dodecanediyl group, and anadamantanediyl group; and the like.

Among these, a tricyclo[5.2.1.0^(2,6)]decanediylgroup (dicyclopentylenegroup) is preferable.

The arylene group is preferably a substituted or unsubstituted arylenegroup having 6 to 14 carbon atoms, such as a phenylene group or anaphthylene group.

Examples of the alkanediyloxy group include groups formed by combiningan alkanediyl group and an oxygen atom. Examples of thecycloalkanediyloxy group include groups formed by combining acycloalkanediyl group and an oxygen atom.

Examples of the divalent group formed by combining arbitrary groupsamong the above groups include a divalent group formed by combining analkanediyl group and a cycloalkanediyl group, a divalent group formed bycombining an alkanediyl group and an arylene group, and the like.

Specific examples of the group represented by X include the groups shownby the following formulas.

wherein “*” indicates a bonding hand.

Specific Substituent (SI)

The polymer (A) according to one embodiment of the invention includesthe group shown by the formula (2).

Examples of the group shown by the formula (2) include alkynyloxy groupssuch as an ethynyloxy group, a (prop-1-yn-1-yl)oxy group, a(prop-2-yn-1-yl)oxy group, a (but-1-yn-1-yl)oxy group, a(but-3-yn-1-yl)oxy group, a (1-methylprop-2-yn-1-yl)oxy group, a(pent-1-yn-1-yl)oxy group, a (pent-4-yn-1-yl)oxy group, a(hex-1-yn-1-yl)oxy group, a (hex-5-yn-1-yl)oxy group, a(hept-1-yn-1-yl)oxy group, a (hept-6-yn-1-yl)oxy group, an(oct-1-yn-1-yl)oxy group, an (oct-7-yn-1-yl)oxy group, a(non-1-yn-1-yl)oxy group, a (non-8-yn-1-yl)oxy group, a(dec-1-yn-1-yl)oxy group, a (dec-9-yn-1-yl)oxy group, an(undec-1-yn-1-yl)oxy group, an (undec-10-yn-1-yl)oxy group, a(dodec-1-yn-1-yl)oxy group, a (dodec-11-yn-1-yl)oxy group, a(tridec-1-yn-1-yl)oxy group, a (tridec-12-yn-1-yl)oxy group, a(tetradec-1-yn-1-yl)oxy group, a (tetradec-13-yn-1-yl)oxy group, a(pentadec-1-yn-1-yl)oxy group, a (pentadec- 14-yn-1 -yl)oxy group, a(hexadec-1-yn-1-yl)oxy group, a (hexadec-15-yn-1-yl)oxy group, a(heptadec-1-yn-1-yl)oxy group, and a (heptadec-16-yn-1-yl)oxy group.

Among these, a (prop-2-yn-1-yl)oxy group is preferable.

Example of a preferable structural unit (a) include the structural unitsshown by the following formulas.

When the polymer (A) has a low Mw, the amount of sublimates tends toincrease due to an increase in the content of low-molecular-weightcomponents in the composition. When the polymer (A) has a high Mw, thefilling capability tends to deteriorate since the composition losesfluidity. The Mw of the polymer (A) according to one embodiment of theinvention is adjusted to 3000 to 10,000, and preferably 3000 to 5000,taking account of the above phenomena. If the Mw of the polymer (A) iswithin the above range, a resist underlayer film-forming compositionthat does not sublime when forming a resist underlayer film, andexhibits an excellent filling capability can be obtained. Note that theMw of the polymer (A) may be controlled by adjusting the amount ofcondensation agent and the reaction time when producing the polymer (A)(described later).

Dispersity

The filling capability tends to decrease as the dispersity (Mw/Mn; “Mn”refers to polystyrene-reduced number average molecular weight determinedby GPC) of the polymer (A) decreases (i.e., approaches 1). It isconjectured that this is because the space between the aggregates of thepolymer is not sufficiently filled up as the dispersity decreases. Theamount of sublimates tends to increase when forming a resist underlayerfilm as the dispersity increases. It is conjectured that this is becausethe content of low-molecular-weight components in the compositionincreases as the dispersity increases. The dispersity of the polymer (A)according to one embodiment of the invention is preferably adjusted to1.4 to 5.0 taking account of the above phenomena. If the dispersity ofthe polymer (A) is within the above range, sublimation that may occurwhen forming a resist underlayer film can be more effectivelysuppressed, so that the filling capability can be further improved. Notethat the dispersity of the polymer (A) may be controlled by adjustingthe dropwise addition rate of a condensation agent when producing thepolymer (A) (described below).

Method of Producing Polymer (A)

The polymer (A) according to one embodiment of the invention may beobtained by one of the two methods shown in FIG. 1. Specifically, anaphthalene compound that includes a hydroxyl group (hereinafter may bereferred to as “compound (N1)”) is polymerized, or polycondensed with anappropriate condensation agent (aldehyde, ketone, or divinyl compound)to obtain a naphthalene ring-containing polymer that includes a hydroxylgroup (hereinafter may be referred to as “polymer (P1)”), and thepolymer (P1) is alkynyloxyated using a compound that includes a leavinggroup corresponding to the alkynyloxy group (hereinafter may be referredto as “alkynylation agent”) to obtain the polymer (A) (method 1).

Alternatively, a naphthalene compound that includes an alkynyloxy groupobtained by reacting the compound (N1) with the alkynylation agent(hereinafter may be referred to as “compound (N2)”) is polymerized, orpolycondensed with an appropriate condensation agent (aldehyde, ketone,or divinyl compound) to obtain the polymer (A) (method 2).

Method (1)

The method 1 includes subjecting the compound (N1) to radicalpolymerization, cationic polymerization, anionic polymerization, orpolycondensation with the condensation agent (e.g., aldehyde, ketone, ordivinyl compound) to obtain a polymer that includes a hydroxyl group,and alkynyloxyating the polymer that includes a hydroxyl group using acompound that includes the group shown by the formula (2) (hereinaftermay be referred to as “alkynylation agent”).

Compound (N1)

Examples of the compound (N1) include naphthols such as 1-naphthol,2-naphthol, 2-methyl-1-naphthol, 4-methoxy-1-naphthol,7-methoxy-2-naphthol, 1,5-dihydroxynaphthalene,1,7-dihydroxynaphthalene, 2,3-dihydroxynaphthalene,2,6-dihydroxynaphthalene, 2,7-dihydroxynaphthalene, and binaphthol.

Among these, naphthols such as 1-naphthol, 4-methoxy-1-naphthol,7-methoxy-2-naphthol, 1,5-dihydroxynaphthalene,1,7-dihydroxynaphthalene, 2,3-dihydroxynaphthalene, and2,7-dihydroxynaphthalene are preferable.

Examples of the aldehyde that may be used as the condensation agentinclude formaldehyde, trioxane, paraformaldehyde, benzaldehyde,acetaldehyde, o-hydroxybenzaldehyde, m-hydroxybenzaldehyde,p-hydroxybenzaldehyde, o-chlorobenzaldehyde, m-chlorobenzaldehyde,p-chlorobenzaldehyde, o-nitrobenzaldehyde, m-nitrobenzaldehyde,p-nitrobenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde,p-methylbenzaldehyde, p-ethylbenzaldehyde, p-n-butylbenzaldehyde,furfural, and the like.

Examples of the ketone that may be used as the condensation agentinclude acetone, methyl ethyl ketone, methyl isobutyl ketone, and thelike. Examples of the divinyl compound that may be used as thecondensation agent include divinylbenzene, dicyclopentadiene,tetrahydroindene, 4-vinylcyclohexene, 5-vinylnorborn-2-ene,

Among these, formaldehyde and furfural are preferable.

When using an aldehyde as the condensation agent, the aldehyde ispreferably used in an amount of 1 to 1000 parts by mass, and morepreferably 10 to 100 parts by mass, based on 100 parts by mass of anaromatic hydrocarbon.

The compound (N1) may be subjected to polycondensation with thecondensation agent in the presence of an acidic catalyst. Examples ofthe acidic catalyst include mineral acids such as sulfuric acid,phosphoric acid, and perchloric acid; organic sulfonic acids such asp-toluenesulfonic acid; and carboxylic acids such as formic acid andoxalic acid. The acidic catalyst may be used in an appropriate amountdepending on the type of acid. The acidic catalyst is preferably used inan amount of 0.001 to 100 parts by mass, and more preferably 0.01 to 10parts by mass, based on 100 parts by mass of an aromatic hydrocarbon.The reaction (polycondensation) temperature is preferably 20 to 200° C.The reaction time may be appropriately determined depending on thereaction temperature, but is preferably 20 minutes to 72 hours.

Alkynylation Agent

Specific examples of the alkynylation agent include a compound shown bythe following general formula (3).

Y—R¹≡R²   (3)

wherein R¹ and R² are the same as defined for the formula (1), and Yrepresents a leaving group.

Specific examples of the leaving group represented by Y include a chlorogroup, a bromo group, a tosyl group, a mesyl group, atrifluoromethylsulfonyl group, and the like.

Alkynyloxylation

The polymer may be alkynyloxylated by an appropriate synthesis method(e.g., Japanese Patent Application Publication (TOKUHYO) No.2003-533502). Specifically, a solution of the polymer (P1) may bereacted with the alkynylation agent in the presence of a basic compound.

Examples of the solvent used to prepare a solution of the polymer (P1)include methyl isobutyl ketone, tetrahydrofuran, and the like.

Examples of the basic compound include amines, metal hydroxides, metalcarbonates, metal alkoxides, and the like. Among these, amines and metalhydroxides are preferable. Examples of the amines include triethylamine,N,N-diisopropylethylamine, pyridine, N-methylpiperidine,N-methylmorpholine, and the like. Examples of the metal hydroxidesinclude sodium hydroxide and the like.

Method (2)

The method 2 includes reacting the compound (N1) with the alkynylationagent to obtain the compound (N2), and polycondensing the compound (N2).

The alkynylation agent used in the method 2 may be the same as that usedin the method 1. The compound (N2) may be polycondensed in the samemanner as in the method 1.

The polycondensation reaction may be implemented by condensing anaromatic compound or an alkynyloxylated aromatic compound with thecondensation agent (e.g., aldehyde, ketone, or divinyl compound) in thepresence of an acidic catalyst.

Examples of the acidic catalyst (acid catalyst) used forpolycondensation include mineral acids such as sulfuric acid, phosphoricacid, and perchloric acid; organic sulfonic acids such asp-toluenesulfonic acid; and carboxylic acids such as formic acid andoxalic acid. The acidic catalyst may be used in an appropriate amountdepending on the type of acid. The acidic catalyst is normally used inan amount of 0.001 to 100 parts by mass, and more preferably 0.01 to 10parts by mass, based on 100 parts by mass of an aromatic hydrocarbonthat includes a hydroxyl group.

The reaction (condensation) temperature is normally 20 to 200° C. Thereaction time is appropriately determined depending on the reactiontemperature, but is normally 20 minutes to 72 hours. Thepolystyrene-reduced weight average molecular weight (Mw) of thearomatic-containing polymer that includes a hydroxyl group thusobtained, determined by gel permeation chromatography (GPC), ispreferably 2500 or more, and more preferably 3000 or more. The Mw of thepolymer is preferably 12,000 or less, and more preferably 10,000 orless.

Solvent (B)

The resist underlayer film-forming composition according to oneembodiment of the invention includes the solvent (B). The solvent (B)can dissolve the polymer (A) therein. Examples of the solvent (B)include ethylene glycol monoalkyl ethers such as ethylene glycolmonomethyl ether, ethylene glycol monoethyl ether, ethylene glycolmono-n-propyl ether, and ethylene glycol mono-n-butyl ether; ethyleneglycol monoalkyl ether acetates such as ethylene glycol monomethyl etheracetate, ethylene glycol monoethyl ether acetate, ethylene glycolmono-n-propyl ether acetate, and ethylene glycol mono-n-butyl etheracetate; diethylene glycol dialkyl ethers such as diethylene glycoldimethyl ether, diethylene glycol diethyl ether, diethylene glycoldi-n-propyl ether, and diethylene glycol di-n-butyl ether; triethyleneglycol dialkyl ethers such as trienthylene glycol dimethyl ether andtriethylene glycol diethyl ether;

-   propylene glycol monoalkyl ethers such as propylene glycol    monomethyl ether, propylene glycol monoethyl ether, propylene glycol    mono-n-propyl ether, and propylene glycol mono-n-butyl ether;    propylene glycol dialkyl ethers such as propylene glycol dimethyl    ether, propylene glycol diethyl ether, propylene glycol di-n-propyl    ether, and propylene glycol di-n-butyl ether; propylene glycol    monoalkyl ether acetates such as propylene glycol monomethyl ether    acetate, propylene glycol monoethyl ether acetate, propylene glycol    mono-n-propyl ether acetate, and propylene glycol mono-n-butyl ether    acetate;-   lactates such as methyl lactate, ethyl lactate, n-propyl lactate,    i-propyl lactate, n-butyl lactate, and i-butyl lactate;-   aliphatic carboxylates such as methyl formate, ethyl formate,    n-propyl formate, i-propyl formate, n-butyl formate, i-butyl    formate, n-amyl formate, i-amyl formate, methyl acetate, ethyl    acetate, n-propyl acetate, i-propyl acetate, n-butyl acetate,    i-butyl acetate, n-amyl acetate, i-amyl acetate, n-hexyl acetate,    methyl propionate, ethyl propionate, n-propyl propionate, i-propyl    propionate, n-butyl propionate, i-butyl propionate, methyl butyrate,    ethyl butyrate, n-propyl butyrate, i-propyl butyrate, n-butyl    butyrate, and i-butyl butyrate;-   other esters such as ethyl hydroxyacetate, ethyl    2-hydroxy-2-methylpropionate, methyl 3-methoxy-2-methylpropionate,    methyl 2-hydroxy-3-methylbutyrate, ethyl methoxyacetate, ethyl    ethoxyacetate, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate,    ethyl 3-methoxypropionate, 3-methoxypropyl acetate, 3-methoxybutyl    acetate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl    propionate, 3-methyl-3-methoxybutyl butyrate, methyl acetoacetate,    methyl pyruvate, and ethyl pyruvate;-   aromatic hydrocarbons such as toluene and xylene; ketones such as    methyl ethyl ketone, methyl n-propyl ketone, methyl n-butyl ketone,    2-heptanone, 3-heptanone, 4-heptanone, and cyclohexanone; amides    such as N-methylformamide, N,N-dimethylformamide, N-methylacetamide,    N,N-dimethylacetamide, and N-methylpyrrolidone; lactones such-   These compounds may be appropriately selectively used.

Among these, propylene glycol monomethyl ether, ethylene glycolmonoethyl ether acetate, ethyl lactate, n-butyl acetate, ethyl3-ethoxypropionate, methyl preferable. These solvents (B) may be usedeither individually or in combination.

The amount of the solvent (B) is not particularly limited. It ispreferable that the solvent (B) be used so that the solid content in theresist underlayer film-forming composition according to one embodimentof the invention is 0.1 to 30 mass %, for example. Note that the solidcontent in the resist underlayer film-forming composition according toone embodiment of the invention is more preferably 1 to 15 mass %. Ifthe solid content in the resist underlayer film-forming composition is0.1 to 30 mass %, the resist underlayer film-forming composition can beadvantageously applied to a substrate.

Acid Generator (C)

The resist underlayer film-forming composition according to oneembodiment of the invention may optionally include (C) an acid generatoras long as the desired effects of the invention are not impaired.

The acid generator can prevent poisoning (i.e., an acid contained in theresist is inactivated due to diffusion of a substance (inhibitor) (e.g.,a base such as OH⁻, CH₃ ⁻, or NH₂ ⁻) that is generated from thesubstrate (particularly a low-dielectric-constant film) and inhibits achemical reaction of the resist into the resist, so that the pattern ofthe positive-tone resist undergoes footing). Specifically, the acidgenerator contained in the resist underlayer film reacts with theinhibitor, so that diffusion of the inhibitor into the resist can beprevented.

The acid generator (C) generates an acid upon exposure or heating.Examples of the acid generator that generates an acid upon exposure(hereinafter referred to as “photoacid generator”) include the compoundsdisclosed in paragraphs [0076] to [0081]

Among these photoacid generators, diphenyliodoniumtrifluoromethanesulfonate, diphenyliodoniumnonafluoro-n-butanesulfonate, diphenyliodonium pyrenesulfonate,diphenyliodonium n-dodecylbenzenesulfonate, diphenyliodonium10-camphorsulfonate, diphenyliodonium naphthalenesulfonate,bis(4-t-butylphenyl)iodonium trifluoromethanesulfonate,bis(4-t-butylphenyl)iodonium nonafluoro-n-butanesulfonate,bis(4-t-butylphenyl)iodonium n-dodecylbenzenesulfonate,bis(4-t-butylphenyl)iodonium 10-camphorsulfonate,bis(4-t-butylphenyl)iodonium naphthalenesulfonate, and the like arepreferable. These photoacid generators may be used either individuallyor in combination.

Examples of the acid generator that generates an acid upon heating(hereinafter referred to as “thermal acid generator”) include2,4,4,6-tetrabromocyclohexadienone, benzoin tosylate, 2-nitrobenzyltosylate, alkyl sulfonates, and the like. These thermal acid generatorsmay be used either individually or in combination. The photoacidgenerator and the thermal acid generator may be used in combination asthe acid generator (C).

The acid generator (C) is preferably used in an amount of 100 parts bymass or less, more preferably 0.1 to 30 parts by mass, and particularlypreferably 0.1 to 10 parts by mass, based on 100 parts by mass of thearomatic-containing polymer (A) that includes an alkynyloxy group. Ifthe amount of the acid generator (C) is within the above range, theabove effects can be advantageously obtained.

Crosslinking Agent (D)

The resist underlayer film-forming composition according to oneembodiment of the invention may optionally include (D) a crosslinkingagent as long as the desired effects of the invention are not impaired.The resist underlayer film can be cured at a low temperature by addingthe crosslinking agent to the resist underlayer film-formingcomposition.

A polynuclear phenol or a commercially available curing agent may beused as the crosslinking agent (D). Examples of the polynuclear phenolinclude bisphenols such as 4,4′-biphenyldio1, 4,4′-methylenebisphenol,4,4′-ethylidenebispheno1, and bisphenol A; trisphenols such as4,4′,4″-methylidenetrisphenol and4,4′-[1-{4-(1-[4-hydroxyphenyl]-1-methylethyl)phenyl}ethylidene]bisphenol;polyphenols such as a novolac; and the like. Among these,4,4′-[1-{4-(1-[4-hydroxyphenyl]-1-methylethyl)phenyl}ethylidene]bisphenol,a novolac, and the like are preferable. These polynuclear phenols may beused either individually or in combination.

Further examples of the crosslinking agent include diisocyanates such as2,3-tolylene diisocyanate, 2,4-tolylene diisocyanate, 3,4-tolylenediisocyanate, 3,5-tolylene diisocyanate, 4,4′-diphenylmethanediisocyanate, hexamethylene diisocyanate, and 1,4-cyclohexanediisocyanate, epoxy compounds such as Epikote 812, Epikote 815, Epikote826, Epikote 828, Epikote 834, Epikote 836, Epikote 871, Epikote 1001,Epikote 1004, Epikote 1007, Epikote 1009, Epikote 1031 (manufactured byJapan Epoxy Resins Co., Ltd.), Araldite 6600, Araldite 6700, Araldite6800, Araldite 502, Araldite 6071, Araldite 6084, Araldite 6097,Araldite 6099 (manufactured by Ciba-Geigy), DER 331, DER 332, DER 333,DER 661, DER 644, DER 667 (manufactured by Dow Chemical Company);melamine-type curing agents such as Cymel 300, Cymel 301, Cymel 303,Cymel 350, Cymel 370, Cymel 771, Cymel 325, Cymel 327, Cymel 703, Cymel712, Cymel 701, Cymel 272, Cymel 202, Mycoat 506, Mycoat508(manufactured by Nihon Cytec Industries Inc.); benzoguanamine-typecuring agents such as Cymel 1123, Cymel 1123-10, Cymel 1128, Mycoat 102,Mycoat 105, Mycoat 106, Mycoat 130 (manufactured by Mitsui Cyanamid);glycoluril-type curing agents such as Cymel 1170, Cymel 1172(manufactured by Nihon Cytec Industries Inc.), MX-279, Nikalac N-2702(manufactured by Sanwa Chemical Co., Ltd.); and the like. Among these,melamine-type curing agents, glycoluril-type curing agents, and the likeare preferable. These curing agents may be used either individually orin combination. A polynuclear phenol and a curing agent may be used incombination as the crosslinking agent (D).

The crosslinking agent (D) is preferably used in an amount of 100 partsby mass or less, more preferably 1 to 20 parts by mass, and particularlypreferably 1 to 10 parts by mass, based on 100 parts by mass of thearomatic-containing polymer (A) that includes an alkynyloxy group. Ifthe amount of the crosslinking agent (D) is within the above range, theabove effects can be obtained while ensuring that the resist underlayerfilm exhibits the desired performance.

Additive

The resist underlayer film-forming composition according to oneembodiment of the invention may optionally include additives such as athermosetting polymer, a radiation absorber, and surfactant as long asthe desired effects of the invention are not impaired.

Various thermosetting polymers may be used as the thermosetting polymer.The thermosetting polymer (E) is cured upon heating, and becomesinsoluble in a solvent, so that intermixing between the resulting resistunderlayer film and the resist film formed on the resist underlayer filmis prevented. Examples of the thermosetting polymer (E) include acrylicpolymers (thermosetting acrylic polymers), phenol polymers, ureapolymers, melamine polymers, amino polymers, aromatic hydrocarbonpolymers, epoxy polymers, alkyd polymers, and the like. Among these,urea polymers, melamine polymers, aromatic hydrocarbon polymers, and thelike are preferable.

The thermosetting polymer is preferably used in an amount of 10 parts bymass or less, and more preferably 1 to 5 parts by mass, based on 100parts by mass of the aromatic-containing polymer (A) that includes analkynyloxy group.

Examples of the radiation absorber include dyes such as oil-solubledyes, disperse dyes, basic dyes, methine dyes, pyrazole dyes, imidazoledyes, and hydroxyazo dyes; fluorescent whitening agents such as bixinderivatives, norbixin, stilbene, 4,4′-diaminostilbene derivatives,coumarin derivatives, and pyrazoline derivatives; UV absorbers such ashydroxyazo dyes, Tinuvin 234, Tinuvin 1130 (manufactured by Ciba-Geigy);aromatic compounds such as anthracene derivatives and anthraquinonederivatives; and the like. These radiation absorbers may be used eitherindividually or in combination.

The radiation absorber is preferably used in an amount of 50 parts bymass or less, and more preferably 1 to 10 parts by mass, based on 100parts by mass of the aromatic-containing polymer (A) that includes analkynyloxy group.

The surfactant improves the applicability, striation, wettability,developability, and the like. Examples of the surfactant includenonionic surfactants such as polyoxyethylene lauryl ether,polyoxyethylene stearyl ether, polyoxyethylene oleyl ether,polyoxyethylene n-octyl phenyl ether, polyoxyethylene n-nonyl phenylether, polyethylene glycol dilaurate, and polyethylene glycoldistearate, KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.),Polyflow No. 75, Polyflow No. 95 (manufactured by Kyoeisha Chemical Co.,Ltd.), FFTOP EF101, FFTOP EF204, FFTOP EF303, FFTOP EF352 (manufacturedby JEMCO, Inc.), Megafac F171, Megafac F172, Megafac F173 (manufacturedby DIC Corporation), Fluorad FC430, Fluorad FC431, Fluorad FC135,Fluorad FC93 (manufactured by Sumitomo 3M Ltd.), Asahi Guard AG710,Surflon S382, Surflon SC101, Surflon SC102, Surflon SC103, SurflonSC104, Surflon SC105, Surflon SC106 (manufactured by Asahi Glass Co.,Ltd.), and the like. These surfactants may be used either individuallyor in combination.

The surfactant is preferably used in an amount of 15 parts by mass orless, and more preferably 0.001 o 10 parts by mass, based on 100 partsby mass of the aromatic-containing polymer (A) that includes analkynyloxy group.

The resist underlayer film-forming composition may further include otheradditives such as a preservative, an anti-foaming agent, and an adhesionimprover in addition to the radiation absorber and the surfactant.

[2] Method for Forming Pattern

A method for forming a pattern according to one embodiment of theinvention is described below. The method for forming a pattern accordingto one embodiment of the invention includes (1) a step of applying theresist underlayer film-forming composition according to one embodimentof the invention to a substrate to form a resist underlayer film, (2) astep of applying a resist composition to the substrate to form a resistfilm, (3) a step of exposing the resist film by selectively applyingradiation to the resist film via a photomask, (4) a step of developingthe exposed resist film to form a resist pattern, and (5) a step ofdry-etching the resist underlayer film and the substrate using theresist pattern as a mask (etching mask) to form a pattern.

The method for forming a pattern according to one embodiment of theinvention makes it possible to accurately transfer the resist pattern tothe substrate with high reproducibility using the dry etching process.Each step of the method for forming a pattern according to oneembodiment of the invention is described in detail below.

Step (1)

In the step (1) of the method for forming a pattern according to oneembodiment of the invention, a resist underlayer film is formed on asubstrate using the resist underlayer film-forming composition accordingto one embodiment of the invention. A substrate on which the resistunderlayer film is formed can thus be obtained.

Examples of the substrate include an insulating film formed of siliconoxide, silicon nitride, silicon oxynitride, a polysiloxane, or the like,or a wafer coated with a low-dielectric-constant insulating film (e.g.,Black Diamond (manufactured by AMAT), SiLK (manufactured by DowChemical), or Low-k film manufactured by JSR Corporation). A patternedsubstrate provided with a trench, a via, and the like may also be used.

The resist underlayer film-forming composition may be applied to thesubstrate by an arbitrary method. For example, the resist underlayerfilm-forming composition may be applied by spin coating or the like.Since a trench formed in the substrate can be filled with the resistunderlayer film-forming composition, a given pattern can be formed onthe substrate by the etching step described later.

The resist underlayer film may be formed by curing a film formed byapplying the resist underlayer film-forming composition to the substratevia exposure and/or heating. Radiation used for exposure may beappropriately selected from visible rays, ion beams, and the likedepending on the type of the photoacid generator (C) optionally includedin the resist underlayer film-forming composition. A pattern may also beformed by a nanoimprint method or the like.

When heating the film formed by applying the resist underlayerfilm-forming composition, the heating temperature is not particularlylimited, but is preferably 90 to 650° C., more preferably 90 to 450° C.,and particularly preferably 90 to 350° C.

The thickness of the resist underlayer film formed by the step (1) isnot particularly limited, but is preferably 10 to 1000 nm, and morepreferably 30 to 500 nm.

The method for forming a pattern according to one embodiment of theinvention may optionally further include (1′) a step of forming anintermediate layer on the resist underlayer film after the step (1). Theintermediate layer refers to a layer that is provided with a givenfunction required to supplement the functions of the resist underlayerfilm or the resist film (or to provide the resist underlayer film or theresist film with a desired function) when forming a resist pattern. Forexample, when forming an anti-reflective film as the intermediate layer,the intermediate film can supplement the anti-reflective function of theresist underlayer film.

The intermediate layer may be formed using an organic compound or aninorganic oxide. Examples of the organic compound include DUV-42,DUV-44, ARC-28, ARC-29 (manufactured by Brewer Science), AR-3, AR-19(manufactured by

Lohm and Haas), and the like. Examples of the inorganic oxide include aspin-on-glass material manufactured by JSR Corporation, a polysiloxaneformed by CVD, titanium oxide, alumina, tungsten oxide, and the like,and the like.

The intermediate layer may be formed by an arbitrary method. Forexample, the intermediate layer may be formed by a coating method, a CVDmethod, or the like. It is preferable to form the intermediate layer bya coating method. In this case, the intermediate layer can becontinuously formed after forming the resist underlayer film.

The thickness of the intermediate layer may be appropriately selecteddepending on the function required for the intermediate layer. Forexample, when using a normal lithographic process, the thickness of theintermediate layer is preferably 5 to 3000 nm, and more preferably 10 to300 nm. If the thickness of the intermediate layer is less than 5 nm,the intermediate layer may be etched away when etching the resistunderlayer film. If the thickness of the intermediate layer exceeds 3000nm, the difference in pattern dimension may increase when transferringthe resist pattern to the intermediate layer.

Step (2)

In the step (2) of the method for forming a pattern according to oneembodiment of the invention, a resist film is formed using a resistcomposition on the substrate on which the resist underlayer film isformed in the step (1). A resist film is thus formed on the resistunderlayer film. When forming the intermediate layer on the resistunderlayer film, the resist film is formed on the resist underlayer filmand/or the intermediate layer.

Examples of a preferable resist composition used in the step (2) includea positive-tone or negative-tone chemically-amplified resist compositionthat includes a photoacid generator, a positive-tone resist compositionthat includes an alkali-soluble polymer and a quinone diazidesensitizer, a negative-tone resist composition that includes analkali-soluble polymer and a crosslinking agent, a silicon-containingresist that includes a silicon atom as the main component, and the like.

The solid content in the resist composition is not particularly limited,but is preferably 5 to 50 mass %, for example. The resist compositionmay preferably be resist composition may directly be used as the resistcomposition used for the method for forming a pattern according to oneembodiment of the invention.

The resist composition may be applied by an arbitrary method. Forexample, the resist composition may be applied by spin coating or thelike. Note that the amount of the resist composition applied is adjustedso that the resulting resist film has a given thickness.

The resist film may be formed by prebaking the film formed by applyingthe resist composition to volatilize the solvent (i.e., a solventincluded in the resist composition) from the film. The prebakingtemperature is appropriately selected depending on the type of theresist composition and the like. The prebaking temperature is preferably30 to 200° C., and more preferably 50 to 150° C.

Step (3)

In the step (3) of the method for forming a pattern according to oneembodiment of the invention, the resist film formed by the step (2) isexposed by selectively applying radiation to the resist film via aphotomask.

Radiation used in the step (3) may be appropriately selected fromvisible rays, ion beams, and the like depending on the type of acidgenerator included in the resist composition. It is preferable to usedeep ultraviolet rays, and it is particularly preferable to use KrFexcimer laser light (wavelength: 248 nm), ArF excimer laser light(wavelength: 193 nm), F₂ excimer laser light (wavelength: 157 nm), Kr₂excimer laser light (wavelength: 147 nm), ArKr excimer laser light(wavelength: 134 nm), extreme ultraviolet rays (wavelength: 13 nm, forexample), or the like. The exposure method is not particularly limited.An exposure method normally used when forming a pattern may be employed.

Step (4)

In the step (4) of the method for forming a pattern according to oneembodiment of the invention, the resist film exposed in the step (3) isdeveloped to form a resist pattern. A nanoimprint method may be used inthe step (4).

A developer used for development may be appropriately selected dependingon the type of the resist composition. When using a positive-tonechemically-amplified resist composition or a positive-tone resistcomposition that includes an alkali-soluble polymer, an aqueous solutionof an alkali such as sodium hydroxide, potassium hydroxide, sodiumcarbonate, sodium silicate, sodium metasilicate, ammonia, ethylamine,n-propylamine, diethylamine, di-n-propylamine, triethylamine,methyldiethylamine, dimethylethanolamine, triethanolamine,tetramethylammonium hydroxide, tetraethylammonium hydroxide, pyrrole,piperidine, choline, 1,8-diazabicyclo[5.4.0]-7-undecene, or1,5-diazabicyclo[4.3.0]-5-nonene may be used as the developer. Anappropriate amount of an aqueous organic solvent, an alcohol (e.g.,methanol or ethanol), or a surfactant may be added to the alkalineaqueous solution.

When using a negative-tone chemically-amplified resist composition or anegative-tone resist composition that includes an alkali-solublepolymer, an aqueous solution of an alkali (e.g., inorganic alkalis suchas sodium hydroxide, potassium hydroxide, sodium carbonate, sodiumsilicate, sodium metasilicate, and aqueous ammonia, primary amines suchas ethylamine and n-propylamine, secondary amines such as diethylamineand di-n-butylamine, tertiary amines such as triethylamine andmethyldiethylamine, alcohol amines such as dimethylethanolamine andtriethanolamine, quaternary ammonium salts such as tetramethylammoniumhydroxide, tetraethylammonium hydroxide, and choline, and cyclic aminessuch as pyrrole and piperidine) may be used as the developer.

In the step (4), the resist film developed using the developer may berinsed and dried to form a given resist pattern corresponding to thephotomask.

In the step (4), it is preferable to postbake the resist film beforedevelopment (i.e., after exposure in the step (3)) in order to improvethe resolution, the pattern profile, the developability, and the like.The postbaking temperature is appropriately selected depending on thetype of the resist composition and the like. The postbaking temperatureis preferably 50 to 200° C., and more preferably 80 to 150° C.

Step (5)

In the step (5) of the method for forming a pattern according to oneembodiment of the invention, the resist underlayer film and thesubstrate are dry-etched using the resist pattern formed by the step (4)as a mask (etching mask) to form a pattern. When forming theintermediate layer on the resist underlayer film, the intermediate layeris dry-etched together with the resist underlayer film and thesubstrate.

The resist underlayer film and the substrate may be dry-etched using adry etching system. As a source gas used for dry etching, an oxygenatom-containing gas (e.g., O₂, CO, or CO₂), an inert gas (e.g., He, N₂,or Ar), a chlorine atom-containing gas (e.g., Cl₂ or BCl₄), H₂, NH₃, orthe like may be used depending on the elemental composition of theetching target film. These gases may be used in combination.

The method for forming a pattern according to one embodiment of theinvention can form a given substrate-processing pattern by appropriatelyperforming the steps (1) to (5).

EXAMPLES

The invention is further described below by way of examples. Note thatthe invention is not limited to the following examples. In the examplesand comparative examples, the unit “parts” refers to “parts by mass”,and the unit “%” refers to “mass %” unless otherwise specified.

The weight average molecular weight (Mw) and the dispersity (Mw/Mn) weremeasured by gel permeation chromatography (detector: differentialrefractometer) using GPC columns manufactured by Tosoh Corporation(G2000HXL×2, G3000HXL×1) at a flow rate of 1.0 ml/min and a columntemperature of 40° C. (eluant: tetrahydrofuran, standard: monodispersepolystyrene).

Synthesis Example 1 Production of Polymer (A1-1) (1) Synthesis ofCondensate

A separable flask equipped with a thermometer was charged with 10 partsby mass of 1-naphthol, 5 parts by mass of formaldehyde, 1 part by massof p-toluenesulfonic acid, and 30 parts by mass of methyl isobutylketone. The mixture was reacted at 50° C. for 5 hours with stirring toobtain a 1-naphthol/formaldehyde condensate. The condensate had an Mw of890 and a dispersity (Mw/Mn) of 1.4.

(2) Introduction of Specific Substituent

A separable flask equipped with a thermometer was charged with 50 partsby mass of the resulting condensate (A1), 100 parts by mass of propargylbromide, 90 parts by mass of diazabicycloundecene, and 2000 parts bymass of N-methylpyrrolidone. The mixture was reacted at 45° C. for 8hours. After completion of the reaction, the reaction solution wascooled with water to 30° C. or less. The polymer solution was then addedto a large quantity of n-heptane. A solid that precipitated by thisoperation was separated by decantation, and washed with a large quantityof n-heptane. The solid was then dissolved in methyl isobutyl ketone,and washed with oxalic acid (1 wt %) and purified water to remove theremaining base component. The organic layer was dried at 50° C. for 17hours to obtain a polymer (A1-1) having an Mw of 2000 and a dispersity(Mw/Mn) of 1.6.

Synthesis Examples 2 to 28 Polymers (A1-2) to (A2-14)

A condensate was obtained in the same manner as in the step (1) ofSynthesis Example 1, except for appropriately changing the reaction timeand the reaction temperature. The Mw and the dispersity (Mw/Mn) of theresulting condensate are shown in Table 2 (see “Condensate”). Thestructures of the condensates A1 and A2 in Table 2 are shown in Table 1.The specific substituent was introduced into the resulting condensate,and the resulting product was washed and dried in the same manner as inthe step (2) of Synthesis Example 1 to obtain polymers (A1-2) to(A2-14). The Mw and the dispersity (Mw/Mn) of each polymer are shown inTable 2 (see “Specific polymer”).

TABLE 1 A1 1-Naphthol/formaldehyde condensate (polymer includingrepeating unit shown by the following formula [A-1]) A22,7-Naphthalenediol/formaldehyde condensate (polymer including repeatingunit shown by the following formula [A-2]) [A-1]

[A-2]

TABLE 2 Condensate Specific polymer Molec- Molec- ular ular weight Mw/weight Mw/ Type (×10³) Mn Type (×10³) Mn Synthesis Example 1 A1 0.9 1.4A1-1 2.0 1.6 Synthesis Example 2 A1 1.3 1.4 A1-2 3.0 1.6 SynthesisExample 3 A1 1.3 1.2 A1-3 3.0 1.3 Synthesis Example 4 A1 1.3 2.7 A1-43.0 3.0 Synthesis Example 5 A1 1.3 4.8 A1-5 3.0 5.2 Synthesis Example 6A1 2.2 1.4 A1-6 5.0 1.6 Synthesis Example 7 A1 2.2 1.2 A1-7 5.0 1.3Synthesis Example 8 A1 2.2 2.7 A1-8 5.0 3.0 Synthesis Example 9 A1 2.24.8 A1-9 5.0 5.2 Synthesis Example 10 A1 4.4 1.4 A1-10 10 1.6 SynthesisExample 11 A1 4.4 1.2 A1-11 10 1.3 Synthesis Example 12 A1 4.4 2.7 A1-1210 3.0 Synthesis Example 13 A1 4.4 3.9 A1-13 10 5.2 Synthesis Example 14A1 5.4 1.3 A1-14 12 1.6 Synthesis Example 15 A2 0.9 1.5 A2-1 2.0 1.6Synthesis Example 16 A2 1.2 1.4 A2-2 3.0 1.6 Synthesis Example 17 A2 1.21.2 A2-3 3.0 1.3 Synthesis Example 18 A2 1.2 2.8 A2-4 3.0 3.0 SynthesisExample 19 A2 1.2 4.8 A2-5 3.0 5.2 Synthesis Example 20 A2 2.1 1.4 A2-65.0 1.6 Synthesis Example 21 A2 2.1 1.2 A2-7 5.0 1.3 Synthesis Example22 A2 2.1 2.8 A2-8 5.0 3.0 Synthesis Example 23 A2 2.1 4.8 A2-9 5.0 5.2Synthesis Example 24 A2 4.3 1.4 A2-10 10 1.6 Synthesis Example 25 A2 4.31.2 A2-11 10 1.3 Synthesis Example 26 A2 4.3 2.8 A2-12 10 3.0 SynthesisExample 27 A2 4.3 3.9 A2-13 10 5.2 Synthesis Example 28 A2 5.5 1.4 A2-1412 1.6

Production of Resist Underlayer Film-Forming Composition Example 1

10 parts by mass of the polymer (A1-1) was dissolved in 90 parts by massof propylene glycol monomethyl acetate. The solution was filteredthrough a membrane composition.

Examples 2 to 28

A resist underlayer film-forming composition was obtained in the samemanner as in Example 1, except for using the polymer shown in Table 3instead of the polymer (A1-1).

Example 29

10 parts by mass of the polymer (A1-1) was dissolved in 90 parts by massof propylene glycol monomethyl acetate. The solution was filteredthrough a membrane composition.

Examples 30 to 32

A resist underlayer film-forming composition was obtained in the samemanner as in Example 29, except for changing the type or the amount ofeach component as shown in Table 3. Note that the item “Acid generator”shown in Table 3 refers to bis(4-t-butylphenyl)iodoniumnonafluoro-n-butanesulfonate, and the item “Crosslinking agent” shown inTable 3 refers to the compound shown by the following formula.

Evaluation of Performance of Resist Underlayer Film

The capability of filling a depression formed in a substrate with theresist underlayer film and the amount of sublimation (sublimates) wereevaluated using the resist underlayer film-forming composition. Theresults are shown in Table 3.

[Filling Capability]

The filling capability was evaluated by determining whether or not avia-hole is sufficiently filled with the resist underlayer film-formingcomposition. The filling capability was evaluated by the followingmethod. The resist underlayer film-forming composition was spin-coatedonto a tetraethylorthosilicate (TEOS) substrate 1 or 2 (see below). Theresist underlayer film-forming composition was heated at 250° C. for 60seconds on a hot plate. A resist underlayer film having a thickness of300 nm was thus formed inside the via-hole and on the surface of thesubstrate. The filling state of ten randomly selected via-holes formedin each of the substrates 1 and 2 was observed using a scanning electronmicroscope to evaluate the resist underlayer film in accordance with thefollowing standard.

-   AA: The resist underlayer film was formed inside all of the observed    via-holes formed in each of the substrates 1 and 2.-   A: The resist underlayer film was formed inside all of the observed    via-holes formed in the substrate 2, but was not formed inside all    of the observed via-holes formed in the substrate 1.-   B: The resist underlayer film was not formed inside all of the    observed via-holes formed in each of the substrates 1 and 2.

<Substrate 1>

Tetraethylorthosilicate (TEOS) substrate in which via-holes having asize of 140 nm and a depth of 1000 nm were formed at a pitch of 1H/1.2S

<Substrate 2>

Tetraethylorthosilicate (TEOS) substrate in which via-holes having asize of 140 nm and a depth of 500 nm were formed at a pitch of 1H/1.2S

[Amount of Sublimates]

The resist underlayer film-forming composition was spin-coated onto an8-inch silicon wafer. The resist underlayer film-forming composition washeated at 180° C. for 60 seconds, and then heated at 250° C. for 60seconds on a hot plate to form a resist underlayer film having athickness of 300 nm. The amount of sublimates was measured during thisprocess. An 8-inch silicon wafer was attached to the top plate of thehot plate, and the weight of sublimates deposited on the 8-inch siliconwafer was measured after applying the resist underlayer film-formingcomposition 100 times. A case where the amount of sublimates was 1.5 mgor less was evaluated as “AA”, a case where the amount of sublimates wasmore than 1.5 mg and 2.5 mg or less was evaluated as “A”, and a casewhere the amount of sublimates was more than 2.5 mg was evaluated as“B”.

TABLE 3 Cross- Resin (A) Acid linking Filling Subli- Type Partsgenerator agent capability mation Example 1 A1-1 10 AA B Example 2 A1-210 AA AA Example 3 A1-3 10 A AA Example 4 A1-4 10 AA AA Example 5 A1-510 AA A Example 6 A1-6 10 AA AA Example 7 A1-7 10 A AA Example 8 A1-8 10AA AA Example 9 A1-9 10 AA A Example 10 A1-10 10 AA AA Example 11 A1-1110 A AA Example 12 A1-12 10 AA AA Example 13 A1-13 10 AA A Example 14A1-14 10 B AA Example 15 A2-1 10 AA B Example 16 A2-2 10 AA AA Example17 A2-3 10 A AA Example 18 A2-4 10 AA AA Example 19 A2-5 10 AA A Example20 A2-6 10 AA AA Example 21 A2-7 10 A AA Example 22 A2-8 10 AA AAExample 23 A2-9 10 AA A Example 24 A2-10 10 AA AA Example 25 A2-11 10 AAA Example 26 A2-12 10 AA AA Example 27 A2-13 10 AA A Example 28 A2-1410 B AA Example 29 A1-3 10 0.5 1 AA AA Example 30 A1-3 10 0.5 0.5 AA AAExample 31 A2-6 10 0.5 1 AA AA Example 32 A2-6 10 0.5 0.5 AA AA

As is clear from Table 3, an excellent filling capability was obtained,and sublimation was suppressed in Examples 2 to 13, 16 to 27, and 29 to32 in which the resist underlayer film-forming composition according tothe embodiments of the invention was used. In Examples 2, 4, 6, 8, 10,12, 16, 18, 20, 22, 24, 26, and 29 to 32 in which the polymer had apreferable dispersity (Mw/Mn), an improvement in filling capability andsuppression of sublimation were achieved in a more well-balanced manner.

Obviously, numerous modifications and variations of the invention arepossible in light of the above teachings. It is therefore to beunderstood that within the scope of the appended claims, the inventionmay be practiced otherwise than as specifically described herein.

1. A resist underlayer film-forming composition comprising (A) a polymerthat includes a repeating unit shown by a formula (1), and has apolystyrene-reduced weight average molecular weight of 3000 to 10,000,and (B) a solvent,

wherein R³ to R⁸ individually represent a group shown by a formula (2),a hydrogen atom, a hydroxyl group, a substituted or unsubstituted alkylgroup having 1 to 6 carbon atoms, a substituted or unsubstituted alkoxygroup having 1 to 6 carbon atoms, a substituted or unsubstitutedalkoxycarbonyl group having 2 to 10 carbon atoms, a substituted orunsubstituted aryl group having 6 to 14 carbon atoms, or a substitutedor unsubstituted glycidyl ether group having 2 to 6 carbon atoms,provided that at least one of R³ to R⁸ represents the group shown by theformula (2), and X represents a substituted or unsubstituted alkanediylgroup having 1 to 10 carbon atoms, a substituted or unsubstitutedcycloalkanediyl group having 3 to 20 carbon atoms, a substituted orunsubstituted alkanediyloxy group having 1 to 10 carbon atoms, asubstituted or unsubstituted cycloalkanediyloxy group having 3 to 20carbon atoms, a substituted or unsubstituted arylene group having 6 to14 carbon atoms, or a divalent group formed by combining arbitrarygroups among these groups,—O—R¹≡R²   (2) wherein R¹ represents a single bond, a substituted orunsubstituted alkanediyl group having 1 to 20 carbon atoms, or asubstituted or unsubstituted arylene group having 6 to 20 carbon atoms,and R² represents a hydrogen atom, a substituted or unsubstituted alkylgroup having 1 to 20 carbon atoms, or a substituted or unsubstitutedaryl group having 6 to 20 carbon atoms.
 2. The resist underlayerfilm-forming composition according to claim 1, wherein the polymer (A)has a dispersity of 1.4 to 5.0.
 3. The resist underlayer film-formingcomposition according to claim 1, further comprising (C) an acidgenerator.
 4. The resist underlayer film-forming composition accordingto claim 1, further comprising (D) a crosslinking agent.
 5. A method forforming a pattern comprising applying the resist underlayer film-formingcomposition according to claim 1 to a substrate to form a resistunderlayer film, applying a resist composition to the substrate to forma resist film, exposing the resist film by selectively applyingradiation to the resist film via a photomask, developing the exposedresist film to form a resist pattern, and dry-etching the resistunderlayer film and the substrate using the resist pattern as a mask toform a pattern.